07/08/2026
This study presents a precise molecular layer deposition technique using PLD for fabricating ZnO/MgxZn₁₋ₓO quantum cascade laser (QCL) structures. The method enables nanometer-order control, verified by microscopy and X-ray diffraction, and paves the way for high-temperature QCL devices based on wide-bandgap semiconductors.
🔗 https://doi.org/10.1080/14686996.2026.2701639