
08/10/2025
📑Title: Uncooled Based on -Doped Hydrogenated Amorphous -Germanium (a-SiGe:H,N)
Authors: Oscar Velandia et al.
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An uncooled microbolometer is a thermal sensor consisting of a membrane suspended from the substrate to provide thermal insulation. Typically, the membrane is composed of a stack of three films integrated by a supporting film, an IR sensing film, and an IR absorbing film. However, the above increase...